Metastability of Phosphorus or Boron doped a-Si:H films

• Authors: SŤAHEL Pavel; SLÁDEK Petr; ROCA I CABARROCAS Pere; THEYE Marie-Luce
• Year of publication: 1998
• Type: Article in Proceedings
• Conference: MRS 1998 Spring Meeting,
• MU Faculty or unit: Faculty of Education
• Field: Solid matter physics and magnetism
• Keywords: metastability; doped a-Si:H