Method of probe measurement of RF components of plasma potential

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Authors	DVOŘÁK Pavel TKÁČIK Maroš PÁLENIK Juraj
Year of publication	2017
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Presentation of probe method of plasma potential measurement that enables to measure the time-dependent potential components.
Related projects:	Rozvoj centra pro nízkonákladové plazmové a nanotechnologické povrchové úpravy